Getter Based Gas Purifier

Category :Gas Purification System,

The Getter Purifier is designed to provide sub-ppb or ppt impurity levels gases for semiconductor, flatpaneldisplay, solar cell and LED applications through use of heated getter-based purification. The Getter materials(Zirconium and its alloys) remove impurities by combining irreversible chemical bonds and operate at elevated temperatures to purify them. Once the vessel(column or bed) is consumed, it can be replaced with a new vessel, for a new lifetime. Outlet impurity levels for 02, CO, CO2, H20, H2, CH4(THC, NMHC) and N2 are reduced to sub-ppb or ppt concentration. Hydrogen removal unit, ambient operated getter cartridge can eliminate hydrogen impurity. It can be manufactured from high flow rates of 2 to 200 Nm3/h and optionally high pressure up to 200barg(3000psig).