- Singapore
Category :Gas Purification System,
The Carbon Dioxide(CO2) Gas Purification System providing sub-ppb or ppt performance is designed to remove impurities in a process gas through use of high qualified catalyst & adsorption. These materials provide wholly purification in using dual columns(vessels) without downtime. Two columns alternate between purification and regeneration modes. Outlet impurity levels are reduced to below sub-ppb or ppt concentration. The purifier uses dual columns processes designed to provide ultra-high purified gases for semiconductor. flat panel display, LED and solar cell applications. as well as it can be manufactured from high flow rates of 5 to 500 Nm3/h.
Standard Features
Optional Features
The Carbon Dioxide(CO2) Gas Purification System providing sub-ppb or ppt performance is designed to remove impurities in a process gas through use of high qualified catalyst & adsorption. These materials provide wholly purification in using dual columns(vessels) without downtime. Two columns alternate between purification and regeneration modes. Outlet impurity levels are reduced to below sub-ppb or ppt concentration. The purifier uses dual columns processes designed to provide ultra-high purified gases for semiconductor. flat panel display, LED and solar cell applications. as well as it can be manufactured from high flow rates of 5 to 500 Nm3/h.
