Technical features
- Dedicated purge panel
- Weight scale for liquefied gas level monitoring
- Pigtail box for a remote purge near the source
- PLC-based control with touch-screen interface for reliable operation
- Complete startup, canister and line purge routines with proven safe performance
- Adjustable shelf for different canister options up to 20 liter
- Semi-compliant system and controller
- Tool interface for System OK, Request Chem and/or Purge
- Typical systems process applications, including life safety alarm monitoring
- BPSG: TEOS, TEB, TEPO
- High-k dielectrics: 4MS, DMPS, DMDMOS, TMCTS
- Low-k dielectrics: TDMAS, TMA
Cabinet Options
- Superior construction using 11-gauge coldrolled steel, a polyester powder coating for superior corrosion resistance and an all-welded inner enclosure for canister containment
- Cabinet louvers eliminate dead or trapped vapor areas
- Doors – Enclosure gasket and reliable hinges for years of trouble-free service
- Exhaust sensor – Alarm can initiate chemical shutdown or offer warning with non-shutdown audible alarm or remote alarm as needed
- Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
- Fire sensor, ROR or UV/IR, sprinkler head
- 110% canister leak containment
System Options
- Push-gas regulation for consistent delivery pressure
- Multiple outlet configurations with tool interface
- Vacuum pump
- De-gas units
- High-flow systems
- Day tank for continued process during canister change
- Linear-level sensor in day tank for real-time level indication
- Auto-crossover systems for system redundancy and increased uptime
- High-precision scales for grams-per-run information
- Automatic canister refill from bulk supply canisters
- Controller-redundant power supplies, solenoid valves or PLC
- PLC hold last state Touch-Screen Display
- 10.4” full-color display for high visibility
- Provides a graphical display of the entire panel
- Shows valve status during normal operation, purging and manual modes
The Liquid Delivery System is a chemical distribution system designed to maximize efficiency and performance. The self-contained system includes redundant panels with auto-crossover capability for uptime greater than 99.9%. The small footprint with large process capacity is intended for the distribution of liquid chemicals via a push gas. On day-tank-type systems, the liquid level has a linear indication for consistent level monitoring. High-precision scale options offer grams per run for tight process control. PLC components are consistent with our line of gas cabinets and VMB controllers to minimize spare parts inventory. The LDS is a fully automatic system for maximum safety and performance.